IJE TRANSACTIONS C: Aspects Vol. 31, No. 6 (June 2018) 986-996   

PDF URL: http://www.ije.ir/Vol31/No6/C/17-2824.pdf  
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A. M. Pasandi, S. Afrang, S. Dowlati, N. Sharafkhani and G. Rezazadeh
( Received: May 11, 2016 – Accepted in Revised Form: January 04, 2018 )

Abstract    The purpose of this research is to study the mechanical behavior of a micropump with clamped circular diaphragm which is the main component of drug delivery systems. In this paper, the non-linear governing equations of the circular microplate using Kirchhoff thin plate theory was been extracted based on the modified couple stress (MCST) and classical (CT) theories. Then, the non-linear equation of static deflection is solved using Step-by-Step Linearization Method (SSLM) in order to escape the nonlinearity of the differential equation and Galerkin-based reduced-order model is applied to investigate the dynamic motion of the microplate. Afterwards, static and dynamic stabilities of the micropump have been studied based on both MCST and CT, then compared. Also, volumetric flow rate of the micropump was been delved based on both theories and in entire research, presence of the length scale parameter in modified couple stress theory brings this opportunity to study the size effect on the mechanical behavior of the micropump.


Keywords    Microelectromechanical Systems; Micropump; Pull-in Phenomenon; Couple Stress Theory


چکیده    هدف از این تحقیق مطالعه رفتار مکانیکی یک میکروپمپ با دیافراگم دایره ای چسبیده است که جز اصلی سیستمهای تحویل دارو است. در این مقاله معادلات غیرخطی حاکم بر میکروپلیت دایره ای با استفاده از تئوری صفحات نازک کیرشهف، بر اساس فشار دوگانه اصلاح شده (MCST) و تئوریهای کلاسیک (CT) استخراج شده است.سپس معادله غیرخطی انحراف استاتیک با استفاده از روش خطی گام به گام (SSLM) حل می­شود تا از غیرخطی بودن معادله دیفرانسیل بگریزیم و مدل کاهش مرتبه بر مبنای روش گالرکین برای بررسی حرکت پویای میکروپلیت مورد استفاده قرار می گیرد. پس از آن ثبات استاتیکی و دینامیکی میکروپمپ بر اساس MCST و CT مورد بررسی قرار گرفت و سپس مقایسه شد.همچنین میزان جریان حجمی میکروپمپ بر اساس تئوریها و کل پژوهش بررسی شده است. حضور پارامتر مقیاس طول در نظریه فشار دوگانه اصلاح شده این فرصت رابوجود می آورد که اثر اندازه بر رفتار مکانیکی میکروپمپ را بررسی کنیم.


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