IJE TRANSACTIONS B: Applications Vol. 31, No. 11 (November 2018) 1846-1851    Article in Press

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R. Sharma, R. Agarwal, A. K. Dubey and A. Arora
( Received: April 22, 2018 – Accepted in Revised Form: October 26, 2018 )

Abstract    Capacitive Micro-machined Ultrasonic Transducers (CMUTs) are the ultrasonic devices which produce better features in contrast to piezoelectric transducers. The intrinsic parameter of CMUT varies with the variation in geometrical dimension of the device. The cavity height and the radius of the CMUT with circular membrane is varied in the lumped parallel plate model for its impact on the parameters. In this paper, analytical model of circular CMUTs is developed and analyzed by using the parallel-plate capacitor equations. The impact of geometrical changes has been discussed with the parametric analysis of deflection, capacitance, pull in voltage and pressure. The results discussed here will be more helpful in deciding the miniaturization limit of the CMUT prior to fabrication.


Keywords    Geometrical Features, Intrinsic Characteristics, Membrane Materials, Pressure Intensity, Pull in Voltage, Ultrasonic Transducer


چکیده    ترانسفورماتورهای التراسونیک با میکرومکانیکی (CMUT) با ظرفیت‌پذیری، دستگاه‌های اولتراسونیک هستند که ویژگی‌های بهتر را در مقایسه با مبدل‌های پیزوالکتریک تولید می‌کنند. پارامتر ذاتی CMUT با تغییرات در ابعاد هندسی دستگاه متفاوت است. ارتفاع حفره و شعاع CMUT با غشاء دایره‌ای در مدل صفحات موازی توزیع شده برای تاثیر آن بر پارامترها متفاوت است. در این مقاله، مدل تحلیلی CMUTهای دایره‌ای با استفاده از معادلات خازن موازی-صفحه طراحی و ساخته شده است. تاثیر تغییرات هندسی با تجزیه و تحلیل پارامترهای انحراف، خازن، ولتاژ و فشار در نظر گرفته شده است. نتایج مورد بحث در اینجا، در تصمیم‌گیری در مورد محدودیت کمینه‌سازی CMUT قبل از ساختن، مفید خواهد بود.


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