Abstract




 
   

IJE TRANSACTIONS B: Applications Vol. 31, No. 11 (November 2018) 1847-1855    Article in Press

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  IMPACT ANALYSIS OF VARIATION IN GEOMETRICAL FEATURES ON INTRINSIC CHARACTERISTICS OF CMUT
 
R. Sharma, R. Agarwal, A. K. Dubey and A. Arora
 
( Received: April 22, 2018 – Accepted: October 26, 2018 )
 
 

Abstract    Capacitive Micro-machined Ultrasonic Transducers (CMUTs) are the ultrasonic devices which produce better features in contrast to piezoelectric transducers. The intrinsic parameter of CMUT varies with the variation in geometrical dimension of the device. The cavity height and the radius of the CMUT with circular membrane is varied in the lumped parallel plate model for its impact on the parameters. In this paper, analytical model of circular CMUTs is developed and analyzed by using the parallel-plate capacitor equations. The impact of geometrical changes has been discussed with the parametric analysis of deflection, capacitance, pull in voltage and pressure. The results discussed here will be more helpful in deciding the miniaturization limit of the CMUT prior to fabrication.

 

Keywords    Geometrical Features, Intrinsic Characteristics, Membrane Materials, Pressure Intensity, Pull in Voltage, Ultrasonic Transducer

 

References    Oralkan, O., "Capacitive Micromachined Ultrasonic Transducers: Next-Generation Arrays for Acoustic Imaging," IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. UFFC-42, (1986), 52-58.Shams Nateri, M., Azizollah, B. G., “The Effect of Material Properties on Sensitivity of the Microelectromechanical Systems Piezoelectric Hydrophone”, IJE TRANSACTIONS C: Aspects Vol. 30, No. 12, (2017), 1848-1855Suzuki, K., Higuchi, K., and Tanigawa, H., “A silicon electrostatic ultrasonic transducer,” IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 36, (1989), 620-627.Tabarestania, M. S., Ganji, B. A., “Analytical Analysis of Capacitive Pressure Sensor with Clamped Diaphragm”, IJE TRANSACTIONS C: Aspects Vol. 26, No. 3, (2013), 297-302Machida, S., “MEMS technology using back-end of line processes in CMOS LSI”, in Proc. International Interconnect Technology Conference (IITC), (2010), 1–3. Ladabaum, I., Jin, X. C., and . Khuri-Yakub, B. T, “Miniature drumheads: Microfabricated ultrasonic transducers,” Ultrasonics, Vol. 36, (1998), 25–29.Zahorian, J., Hochman, M., Xu, T., Satir, S., Gurun, G., Karaman, M., and Degertekin, F. L., “Monolithic cmut-on-cmos integration for intravascular ultrasound applications,” IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 58, No. 12, (2011), 2659–2667. Hohm, D. and Hess, G., “A subminiature condenser microphone with silicon-nitride membrane and silicon backplate," Journal of the Acoustical Society of America, Vol. 85, (1989), 476-480.  Ladabaum, Jin, X. C., Soh, H. T., Atalar, A., and Khuri-Yakub, B. T., “Surface micromachined  ultrasonic transducers,” IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 45, No. 3, (1998), 678–690. 10.  Ergun, A. S., Yaralioglu, G. G., and Khuri-Yakub, B. T., “Capacitive Micromachined Ultrasonic   Transducers: Theory and Technology,” Journal of Aerospace Engineering, Vol. 16, (2003), 76–84. 11.  Gupta, R. K., “Electrostatic pull-in test structure design for in-situ mechanical property measurement of micro-electromechanical systems (MEMS)”, Ph.D. dissertation, MIT, Cambridge, MA, (1993). 12.   Pelesko, J. A. and Bernstein, D. H., “Modeling of MEMS and NEMS”, London, U.K.: Chapman and Hall/CRC, (2003). 13.  Ahmad, B. and Pratap, R., “Static and dynamic analysis of a capacitive micromachined ultrasonic transducer,” in Proc. Conf. Applicat. Design Mechanical Eng., Kangar, Perlis, Malaysia, (2007), 25–26. 14.  Ganji, B. A. , Mousavi, A., “Accurate Determination of Pull-in Voltage for MEMS Capacitive Devices with Clamped Square Diaphragm”, International Journal of Engineering, B: Applications Vol. 25, No. 3, (2012) 161-166. 15.  Ahmad, B., Pratap, R., “Elasto-electrostatic analysis of circular microplates used in capacitive micromachined ultrasonic transducers”, IEEE Sensors Journal, Vol. 10, No. 11, (2010), 1767-1773.  16.  Sharma, R., Agarwal, R., Arora, A., “Evaluation of Ultrasonic Transducer with Divergent Membrane Materials and Geometries”, Smart Trends in Information Technology and Computer Communications, Vol. 628, (2016), 779-787. 17.   Nabian, A., Rezazadeh, G., Haddad-derafshi, M., and Tahmasebi, A., “Mechanical behavior of a circular micro plate subjected to uniform hydrostatic and non-uniform electrostatic pressure,” Microsyst. Technol., Vol. 14, (2008), pp. 235–240. 18.  Sharma, R., Agarwal, R., Arora, A., “Performance analysis of MEMS-based ultrasonic transducer with different membrane materials”, Recent Trends Sens. Res. Technol., Vol. 1, No.3, (2014), 1–8, 2014.





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