IJE TRANSACTIONS B: Applications Vol. 31, No. 11 (November 2018) 1840-1846    Article in Press

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S. Mohammadzadeh Bazarchi and E. Abbaspour-Sani
( Received: April 07, 2018 – Accepted: August 17, 2018 )

Abstract    In this paper, the MEMS type ionization gauge with no X-Ray limitations is presented. The designed gauge, in dimensions of 2.4 mm× 0.8mm × 1.4 mm, is 9000 times smaller than the conventional type and can operate in HV and UHV pressures up to 5×10-9 torr. Operating at the temperature of 750°C, the cathode of proposed gauge is implemented using nickel and works in a way in which its temperature, independent of the peripheral gas pressure, remains constant throughout it. The total power consumption of the design is 430 times less than the conventional type. The electrical, thermal, mechanical, ionization collisions and elastic collisions have been performed using COMSOL5 program, and the output data from COMSOL were analyzed by MATLAB. The simulation results are used in designing of cathode and other parts’ dimensions. The simulation results show that the sensitivity factor is 0.2 1/torr


Keywords    MEMS ionization gauge, MEMS vacuum sensor, hot cathode ion gauge, vacuum pressure sensor, ion gauge X-Ray limitations.


چکیده    در این مقاله گیج یونی کاتد گرم نوع سیستم های میکروالکترومکانیکی و بدون محدودیت اشعه ایکس ارائه می‌شود. طرح در ابعاد 1.4×0.8×2.4 میلیمتر مکعب بوده و 9000 برابر از نوع متعارف کوچکتر است. طرح پیشنهادی در محدوده خلا بالا و خلا خیلی بالا تا حداقل فشار خلاء 9-10×5 تور می‌تواند عمل نماید. کاتد طرح در دمای 750 درجه سانتی‌گراد کار می‌کند. کاتد از جنس نیکل بوده و طرح آن طوری است که دمای آن در طول آن ثابت و مستقل از فشار گاز محیطی است. توان مصرفی طرح 430 برابر از مقدار نوع متعارف کمتر است. در این مقاله شبیه‌سازی الکتریکی, گرمایی, مکانیکی, برخورد یونیزاسیون و برخورد الاستیک توسط برنامه کامسول 5 انجام می‌گیرد. داده های خروجی از شبیه‌سازی کامسول توسط برنامه مطلب تحلیل می‌شود. از نتایج شبیه‌سازی برای طرح کاتد و انتخاب ابعاد قسمت‌های دیگر استفاده می‌شود. از نتایج شبیه‌سازی ضریب حساسیت 0.2 بر تور حاصل شده است.

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