Abstract




 
   

IJE TRANSACTIONS B: Applications Vol. 31, No. 11 (November 2018) 1883-1892    Article in Press

PDF URL: http://www.ije.ir/Vol31/No11/B/12-2937.pdf  
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  DESIGN AND SIMULATION OF HOT CATHODE IONIZATION VACUUM GAUGE WITH NO X-RAY LIMITATIONS
 
S. Mohammadzadeh Bazarchi and E. Abbaspour Sani
 
( Received: April 07, 2018 – Accepted in Revised Form: August 17, 2018 )
 
 

Abstract    In this paper, the MEMS type ionization gauge with no X-Ray limitations has been presented. Having the dimensions of 2.4 mm× 0.8mm × 1.4 mm, the designed gauge is 9000 times smaller than the conventional type and can operate in HV and UHV pressures up to 5×10-9 torr. Operating at the temperature of 750°C, the cathode of proposed gauge is implemented using nickel and works in a way in which its temperature, independent of the peripheral gas pressure, remains constant throughout it. The total power consumption of the designed scheme is 430 times less than the conventional type. The electrical, thermal, mechanical, ionization collisions and elastic collisions have been performed using COMSOL5 program, and the output data from COMSOL were analyzed by MATLAB. The simulation results have been employed in implementation of cathode and other parts’ dimensions and based on these results the sensitivity factor of 0.2 1/torr was obtained.

 

Keywords    MEMS Ionization Gauge; MEMS Vacuum Sensor; Hot Cathode Ion Gauge; Vacuum Pressure Sensor; Ion Gauge X-Ray Limitations

 

چکیده   

در این مقاله گیج یونی کاتد گرم نوع سیستم های میکروالکترومکانیکی و بدون محدودیت اشعه ایکس ارائه می‌شود. طرح در ابعاد 1.4×0.8×2.4 میلیمتر مکعب بوده و 9000 برابر از نوع متعارف کوچکتر است. طرح پیشنهادی در محدوده خلا بالا و خلا خیلی بالا تا حداقل فشار خلاء 9-10×5 تور می‌تواند عمل نماید. کاتد طرح در دمای 750 درجه سانتی‌گراد کار می‌کند. کاتد از جنس نیکل بوده و طرح آن طوری است که دمای آن در طول آن ثابت و مستقل از فشار گاز محیطی است. توان مصرفی طرح 430 برابر از مقدار نوع متعارف کمتر است. در این مقاله شبیه‌سازی الکتریکی, گرمایی, مکانیکی, برخورد یونیزاسیون و برخورد الاستیک توسط برنامه کامسول 5 انجام می‌گیرد. داده های خروجی از شبیه‌سازی کامسول توسط برنامه مطلب تحلیل می‌شود. از نتایج شبیه‌سازی برای طرح کاتد و انتخاب ابعاد قسمت‌های دیگر استفاده می‌شود. از نتایج شبیه‌سازی ضریب حساسیت 0.2 بر تور حاصل شده است.

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