IJE TRANSACTIONS B: Applications Vol. 31, No. 11 (November 2018) 1883-1892    Article in Press

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S. Mohammadzadeh Bazarchi and E. Abbaspour Sani
( Received: April 07, 2018 – Accepted in Revised Form: August 17, 2018 )

Abstract    In this paper, the MEMS type ionization gauge with no X-Ray limitations has been presented. Having the dimensions of 2.4 mm× 0.8mm × 1.4 mm, the designed gauge is 9000 times smaller than the conventional type and can operate in HV and UHV pressures up to 5×10-9 torr. Operating at the temperature of 750°C, the cathode of proposed gauge is implemented using nickel and works in a way in which its temperature, independent of the peripheral gas pressure, remains constant throughout it. The total power consumption of the designed scheme is 430 times less than the conventional type. The electrical, thermal, mechanical, ionization collisions and elastic collisions have been performed using COMSOL5 program, and the output data from COMSOL were analyzed by MATLAB. The simulation results have been employed in implementation of cathode and other parts’ dimensions and based on these results the sensitivity factor of 0.2 1/torr was obtained.


Keywords    MEMS Ionization Gauge; MEMS Vacuum Sensor; Hot Cathode Ion Gauge; Vacuum Pressure Sensor; Ion Gauge X-Ray Limitations



در این مقاله گیج یونی کاتد گرم نوع سیستم های میکروالکترومکانیکی و بدون محدودیت اشعه ایکس ارائه می‌شود. طرح در ابعاد 1.4×0.8×2.4 میلیمتر مکعب بوده و 9000 برابر از نوع متعارف کوچکتر است. طرح پیشنهادی در محدوده خلا بالا و خلا خیلی بالا تا حداقل فشار خلاء 9-10×5 تور می‌تواند عمل نماید. کاتد طرح در دمای 750 درجه سانتی‌گراد کار می‌کند. کاتد از جنس نیکل بوده و طرح آن طوری است که دمای آن در طول آن ثابت و مستقل از فشار گاز محیطی است. توان مصرفی طرح 430 برابر از مقدار نوع متعارف کمتر است. در این مقاله شبیه‌سازی الکتریکی, گرمایی, مکانیکی, برخورد یونیزاسیون و برخورد الاستیک توسط برنامه کامسول 5 انجام می‌گیرد. داده های خروجی از شبیه‌سازی کامسول توسط برنامه مطلب تحلیل می‌شود. از نتایج شبیه‌سازی برای طرح کاتد و انتخاب ابعاد قسمت‌های دیگر استفاده می‌شود. از نتایج شبیه‌سازی ضریب حساسیت 0.2 بر تور حاصل شده است.


1. Zhang, L.-M., Jiao, B.-B., Yun, S.-C., Kong, Y.-M., Ku, C.-W. and Chen, D.-P., "A cmos compatible mems pirani vacuum gauge with monocrystal silicon heaters and heat sinks", Chinese Physics Letters,  Vol. 34, No. 2, (2017), 1-4.
2. Piotto, M., Del Cesta, S. and Bruschi, P., "A compact cmos compatible micro-pirani vacuum sensor with wide operating range and low power consumption", Procedia Engineering,  Vol. 168, (2016), 766-769.
3. Grzebyk, T. and Górecka-Drzazga, A., "Mems type ionization vacuum sensor", Sensors and Actuators A: Physical,  Vol. 246, (2016), 148-155.
4. O'Hanlon, J.F., "A user's guide to vacuum technology, John Wiley & Sons,  (2005).
5. Grzebyk, T., Górecka-Drzazga, A., Dziuban, J.A., Maamari, K., An, S., Dankovic, T., Feinerman, A. and Busta, H., "Integration of a mems-type vacuum pump with a mems-type pirani pressure gauge", Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena,  Vol. 33, No. 3, (2015), 03C103.
6. Pasandi, A., Afrang, S., Dowlati, S., Sharafkhani, N. and Rezazadeh, G., "Study of volumetric flow rate of a micropump using a non-classical elasticity theory", International Journal of Engineering-Transactions C: Aspects,  Vol. 31, No. 6, (2018), 986-996.
7. Suginuma, S., Hirata, M. and Kobata, T., "Simulation of relative sensitivity coefficient of bayard-alpert gauge  Journal of the Vacuum Society of Japan,  Vol. 59, (2016), 156-159.
8. Kim, Y.-K. and Desclaux, J.-P., "Ionization of carbon, nitrogen, and oxygen by electron impact", Physical Review A,  Vol. 66, No. 1, (2002), 1-12.
9. Jiaqi, W. and Jun, Y., "Fabrication process and electro-thermal modeling for the cathode of the cmos-compatible hot-filament vacuum gauge", Key Engineering Materials,  (2015).
10. Braithwaite, N.S.J., "Introduction to gas discharges", Plasma Sources Science and Technology,  Vol. 9, No. 4, (2000), 517.
11. Salarvand, A. and Poursaeidi, E., "Comparison of properties of ti/tin/ticn/tialn film deposited by cathodic arc physical vapor and plasma-assisted chemical vapor deposition on custom 450 steel substrates", International Journal of Engineering-Transactions A: Basics,  Vol. 29, No. 10, (2016), 1459-1468.
12. Azadi, M., Iziy, M., Marbout, A. and Rizi, M., "Investigation of the heat treatment effect on microstructures and phases of inconel 713c superalloy", International Journal of Engineering-Transactions A: Basics,  Vol. 30, No. 10, (2017), 1538-1544.
13. Itikawa, Y., "Cross sections for electron collisions with nitrogen molecules", Journal of physical and chemical reference data,  Vol. 35, No. 1, (2006), 31-53.
14. Humphries, S., "Charged particle beams, Courier Corporation,  (2013).
15. Tämm, K., Mayeux, C., Sikk, L., Gal, J.-F. and Burk, P., "Theoretical modeling of sensitivity factors of bayard-alpert ionization gauges", International Journal of Mass Spectrometry,  Vol. 341, (2013), 52-58.

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